Jacob

Thanks Michiel, it is now working. The only problem now is how to rescale the dimension of the green layer(I belive it's the substrate)? my layout is very small compared to the generated green substrate (see attached screenshot)

The process layer map codes is attached here. sorry I could't attach them both at ones, not sure why. would you please advise me if the my layer defintion is right?

The process defintion file is attached here

Hi, I translate the attached layer map into a process defintion file as you suggested in the read me file. but when I run the GDS3D, it is always saying that there is no subtrate layer although I added it. Can you help to resolve this? thanks